Characterization of ArF immersion process for production (Invited Paper)
- 著者名:
Kohler, C. ( ASML Netherlands B.V. (Netherlands) ) de Boeij, W. ( ASML Netherlands B.V. (Netherlands) ) van Ingen-Schenau, K. ( ASML Netherlands B.V. (Netherlands) ) van de Kerkhof, M. ( ASML Netherlands B.V. (Netherlands) ) de Klerk, J. ( ASML Netherlands B.V. (Netherlands) ) Kok, H. ( ASML Netherlands B.V. (Netherlands) ) Swinkels, G. ( ASML Netherlands B.V. (Netherlands) ) Finders, J. ( ASML Netherlands B.V. (Netherlands) ) Mulkens, J. ( ASML Netherlands B.V. (Netherlands) ) Fiolka, D. ( Carl Zeiss SMT AG (Germany) ) Heil, T. ( Carl Zeiss SMT AG (Germany) ) - 掲載資料名:
- Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5754
- 発行年:
- 2005
- パート:
- 1
- 開始ページ:
- 13
- 終了ページ:
- 22
- 総ページ数:
- 10
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819457349 [0819457345]
- 言語:
- 英語
- 請求記号:
- P63600/5754
- 資料種別:
- 国際会議録
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