Organosiloxane based bottom antireflective coatings for 193nm lithography
- 著者名:
Son, E.-K. ( Dongjin Semichem Co., Ltd. (Soufh Korea) ) Kim, J.-W. ( Dongjin Semichem Co., Ltd. (Soufh Korea) ) Lee, S.-H. ( Dongjin Semichem Co., Ltd. (Soufh Korea) ) Park, C.-S. ( Dongjin Semichem Co., Ltd. (Soufh Korea) ) Lee, J.-W. ( Dongjin Semichem Co., Ltd. (Soufh Korea) ) Kim, J. ( Dongjin Semichem Co., Ltd. (Soufh Korea) ) Lee, G.-S. ( Hynix Semlconductor Inc. (South Korea) ) Lee, S.-K. ( Hynix Semlconductor Inc. (South Korea) ) Ban, K.-D. ( Hynix Semlconductor Inc. (South Korea) ) Jung, J.-C. ( Hynix Semlconductor Inc. (South Korea) ) Bok, C. K. ( Hynix Semlconductor Inc. (South Korea) ) Moon, S.-C. ( Hynix Semlconductor Inc. (South Korea) ) - 掲載資料名:
- Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5753(1)
- 発行年:
- 2005
- パート:
- 1
- 開始ページ:
- 449
- 終了ページ:
- 458
- 総ページ数:
- 10
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819457332 [0819457337]
- 言語:
- 英語
- 請求記号:
- P63600/5753-1
- 資料種別:
- 国際会議録
類似資料:
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
2
国際会議録
Resolution enhanced top anti-reflective coating materials for ArF immersion lithography [6153-74]
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
10
国際会議録
Highly etch-selective spin-on bottom antireflective coating for use in 193-nm lithography and beyond
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |