Actively controlled diffraction grating interferometer MEMS devices

Actively controlled diffraction grating interferometer MEMS devices

著者名:

Kim, B. ( Georgia Institute of Technology (USA) and Naval Postgraduate School (USA) )
Schmittdiel, M.C. ( Georgia Institute of Technology (USA) )
Degertekin, F.L. ( Georgia Institute of Technology (USA) )
Kurfess, T.R. ( Georgia Institute of Technology (USA) )

掲載資料名:

MOEMS Display and Imaging Systems III

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5721

発行年:

2005

開始ページ:

151

終了ページ:

158

総ページ数:

8

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819456953 [0819456950]

言語:

英語

請求記号:

P63600/5721

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014938
シリーズID:	PA00000029
会議名:	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : MOEMS Display and Imaging Systems
回次:	2005 : 3rd
会議開催地:	San Jose, CA, USA
会議開催年:	2005.01.24-2005.04.25

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