Maskless optical lithography using MEMS-based spatial light modulators (Invited Paper)
- 著者名:
- Menon, R. ( Massachusetts Institute of Technology (USA) )
- Patel, A. ( Massachusetts Institute of Technology (USA) )
- Smith, H.I. ( Massachusetts Institute of Technology (USA) )
- 掲載資料名:
- MOEMS Display and Imaging Systems III
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5721
- 発行年:
- 2005
- 開始ページ:
- 53
- 終了ページ:
- 63
- 総ページ数:
- 11
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819456953 [0819456950]
- 言語:
- 英語
- 請求記号:
- P63600/5721
- 資料種別:
- 国際会議録
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