Fabrication techniques for low-loss silicon nitride waveguides

Fabrication techniques for low-loss silicon nitride waveguides

著者名:

Shaw, M.J. ( Sandia National Labs. (USA) )
Guo, J. ( Sandia National Labs. (USA) )
Vawter, G.A. ( Sandia National Labs. (USA) )
Habermehl, S. ( Sandia National Labs. (USA) )
Sullivan, C.T. ( Sandia National Labs. (USA) )

掲載資料名:

Micromachining technology for micro-optics and nano-optics III : 25-27 January 2005, San JOse, California, USA

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5720

発行年:

2005

開始ページ:

109

終了ページ:

118

総ページ数:

10

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819456946 [0819456942]

言語:

英語

請求記号:

P63600/5720

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014937
シリーズID:	PA00000029
会議名:	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : Micromachining Technology for Micro-Optics and Nano-Optics
回次:	2005 : 3rd
会議開催地:	San Jose, CA, USA
会議開催年:	2005.01.25-2005.01.27

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