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MEMS metrology techniques (Invited Paper)

著者名:
Novak, E. ( Veeco Instruments (USA) )  
掲載資料名:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5716
発行年:
2005
開始ページ:
173
終了ページ:
181
総ページ数:
9
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456908 [081945690X]
言語:
英語
請求記号:
P63600/5716
資料種別:
国際会議録

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