Universal fixture for assembling and testing of a silicon-based microcombustor
- 著者名:
- Jin, Y. ( Peking Univ. (China) )
- Shan, X.C. ( Singapore institute of Manufacturing Technology (Singapore) )
- Wang, Z. ( Singapore institute of Manufacturing Technology (Singapore) )
- Zhang, H. ( Peking Univ. (China) )
- Wong, C.K. ( Singapore Institute of Manufacturing Technology (Singapore) )
- 掲載資料名:
- Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5716
- 発行年:
- 2005
- 開始ページ:
- 95
- 終了ページ:
- 102
- 総ページ数:
- 8
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819456908 [081945690X]
- 言語:
- 英語
- 請求記号:
- P63600/5716
- 資料種別:
- 国際会議録
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