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Universal fixture for assembling and testing of a silicon-based microcombustor

著者名:
  • Jin, Y. ( Peking Univ. (China) )
  • Shan, X.C. ( Singapore institute of Manufacturing Technology (Singapore) )
  • Wang, Z. ( Singapore institute of Manufacturing Technology (Singapore) )
  • Zhang, H. ( Peking Univ. (China) )
  • Wong, C.K. ( Singapore Institute of Manufacturing Technology (Singapore) )
掲載資料名:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5716
発行年:
2005
開始ページ:
95
終了ページ:
102
総ページ数:
8
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456908 [081945690X]
言語:
英語
請求記号:
P63600/5716
資料種別:
国際会議録

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