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Characterization of (near) hermetic zero-level packages for MEMS (Invited Paper)

著者名:
De Moor, P. ( IMEC (Belgium) )
Baert, K. ( IMEC (Belgium) )
De Wolf, L. ( IMEC (Belgium) )
Jourdain, A. ( IMEC (Belgium) )
Tilman, H.A.C. ( IMEC (Belgium) )
Witvrouw, A. ( IMEC (Belgium) )
Van Hoof, C.A. ( IMEC (Belgium) )
さらに 2 件
掲載資料名:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5716
発行年:
2005
開始ページ:
26
終了ページ:
35
総ページ数:
10
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456908 [081945690X]
言語:
英語
請求記号:
P63600/5716
資料種別:
国際会議録

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