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Phosphorus-doped diamond-like carbon films deposited by plasma-assisted free electron and ArF laser ablation method

著者名:
Suzuki, K. ( Nihon Univ. (Japan) )  
掲載資料名:
Photon Processing in Microelectronics and Photonics IV
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5713
発行年:
2005
開始ページ:
610
終了ページ:
617
総ページ数:
8
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456878 [081945687X]
言語:
英語
請求記号:
P63600/5713
資料種別:
国際会議録

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