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Wafer-level packaging of pressure sensor using SU8 photoresist

著者名:
  • Iliescu, C. I. ( Institute of Biaengineering and Nanotechnology (Singapore) )
  • Tay, F. E. H. ( Institute of Bioengineering and Nanotechnology (Singapore) and National Univ. of Singapore (Singapore) )
  • Miao, J. ( Nanyang Technological Univ. (Singapore) )
  • Avram, M. ( National Institute for Research and Development in Microtechnologies (Romania) )
掲載資料名:
Smart structures, devices, and systems II : 13-15 December 2004, Sydney, Australia
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5649
発行年:
2004
開始ページ:
297
終了ページ:
305
総ページ数:
9
出版情報:
Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456090 [0819456098]
言語:
英語
請求記号:
P63600/5649-1
資料種別:
国際会議録

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