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Analysis on the optical MEMS pressure sensors based on circular multilayer diaphragm

著者名:
  • Li, M. ( Nanjing Normal Univ. (China) )
  • Wang, M. ( Nanjing Normal Univ. (China) )
  • Wang, T. ( Nanjing Normal Univ. (China) )
  • Rong, H. ( Nanjing Normal Univ. (China) )
  • Chen, X. ( Nanjing Normal Univ. (China) )
掲載資料名:
MEMS/MOEMS Technologies and Applications II
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5641
発行年:
2004
開始ページ:
238
終了ページ:
245
総ページ数:
8
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455963 [0819455962]
言語:
英語
請求記号:
P63600/5641
資料種別:
国際会議録

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