Electrochemical etching of deep-macropore array on p-type silicon wafers
- 著者名:
- Gao, Y. ( Jilin Univ. (China) )
- Wang, G. ( Changchun Univ. of Science and Technology (China) )
- Duanmu, O. ( Changchun Univ. of Science and Technology (China) )
- Tian, J. ( Changchun Univ. of Science and Technology (China) )
- 掲載資料名:
- MEMS/MOEMS Technologies and Applications II
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5641
- 発行年:
- 2004
- 開始ページ:
- 201
- 終了ページ:
- 204
- 総ページ数:
- 4
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819455963 [0819455962]
- 言語:
- 英語
- 請求記号:
- P63600/5641
- 資料種別:
- 国際会議録
類似資料:
SPIE - The International Society of Optical Engineering |
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2
国際会議録
Formation of electron multiplier by utilizing the MEMS bulk-silicon-micro-machining technology
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society of Optical Engineering |
Electrochemical Society |
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
SPIE - The International Society of Optical Engineering |
American Institute of Chemical Engineers |