A high-g overload-protected accelerometer with a novel microstructure
- 著者名:
Chen, W. ( Harbin Institute of Technology (China) ) Wang, W. ( China Electronics Technology Group Corp. (China) ) Tian, L. ( China Electronics Technology Group Corp. (China) ) Liu, X. ( Harbin Institute of Technology (China) ) Huo, M. ( Harbin Institute of Technology (China) ) Zhang, R. ( Harbin Institute of Technology (China) ) Zhang, D. ( Harbin Institute of Technology (China) ) - 掲載資料名:
- MEMS/MOEMS Technologies and Applications II
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5641
- 発行年:
- 2004
- 開始ページ:
- 82
- 終了ページ:
- 86
- 総ページ数:
- 5
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819455963 [0819455962]
- 言語:
- 英語
- 請求記号:
- P63600/5641
- 資料種別:
- 国際会議録
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