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Research on novel beam homogenizer for excimer laser and evaluating norm of beam uniformity

著者名:
Li, H. ( Shanghai Institute of Optics and Fine Mechanics CAS (China) )
Lou, Q. ( Shanghai Institute of Optics and Fine Mechanics CAS (China) )
Ye, Z. ( Shanghai Institute of Optics and Fine Mechanics CAS (China) )
Dong, J. ( Shanghai Institute of Optics and Fine Mechanics CAS (China) )
Wei, Y. ( Shanghai Institute of Optics and Fine Mechanics CAS (China) )
Ling, L. ( Shanghai Institute of Optics and Fine Mechanics CAS (China) )
さらに 1 件
掲載資料名:
Optical design and testing II : 8-12 November 2004, Beijing, China
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5638
発行年:
2004
開始ページ:
843
終了ページ:
849
総ページ数:
7
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455932 [0819455938]
言語:
英語
請求記号:
P63600/5638-2
資料種別:
国際会議録

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