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An instrument for surface roughness measurement of optical thin films

著者名:
  • Hou, H. ( Shanghai Institute of Optics and Fine Mechanics, CAS (China) )
  • Yi, K. ( Shanghai Institute of Optics and Fine Mechanics, CAS (China) )
  • Shao, J. ( Shanghai Institute of Optics and Fine Mechanics, CAS (China) )
  • Fan, Z. ( Shanghai Institute of Optics and Fine Mechanics, CAS (China) )
掲載資料名:
Optical design and testing II : 8-12 November 2004, Beijing, China
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5638
発行年:
2004
開始ページ:
638
終了ページ:
641
総ページ数:
4
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455932 [0819455938]
言語:
英語
請求記号:
P63600/5638-2
資料種別:
国際会議録

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