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High-speed nanometer lapping photonics elements

著者名:
  • Yang, J. ( Changchun Univ. of Science and Technology (China) )
  • Liu, Q. ( Changchun Univ. of Science and Technology (China) )
  • Tian, C. ( Changchun Univ. of Science and Technology (China) )
掲載資料名:
Nanophotonics, Nanostructure, and Nanometrology
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5635
発行年:
2004
開始ページ:
482
終了ページ:
487
総ページ数:
6
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455901 [0819455903]
言語:
英語
請求記号:
P63600/5635
資料種別:
国際会議録

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