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Silicon microstructuring using ultrashort laser pulses

著者名:
Zhu, J. ( Fudan Univ. (China) )
Li, W. ( The Chinese Univ. of Hong Kong (Hong Kong China) )
Zhao, M. ( Fudan Univ. (China) )
Yin, G. ( Fudan Univ. (China) )
Chen, X. ( Fudan Univ. (China) )
Chen, D. ( Harbin Institute of Technology (China) )
Zhao, L. ( Fudan Univ. (China) )
さらに 2 件
掲載資料名:
Lasers in Material Processing and Manufacturing II
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5629
発行年:
2004
開始ページ:
276
終了ページ:
283
総ページ数:
8
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455840 [0819455849]
言語:
英語
請求記号:
P63600/5629
資料種別:
国際会議録

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