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Advanced photomask repair technology for 65-nm lithography: II

著者名:
Itou, Y. ( Semiconductor Leading Edge Technologies, Inc. (Japan) )
Tanaka, Y. ( Semiconductor Leading Edge Technologies, Inc. (Japan) )
Yoshioka, N. ( Semiconductor Leading Edge Technologies, Inc. (Japan) )
Sugiyama, Y. ( SII NanoTechnology Inc. (Japan) )
Hagiwara, R. ( SII NanoTechnology Inc. (Japan) )
Takahashi, H. ( SII NanoTechnology Inc. (Japan) )
Takaoka, O. ( SII NanoTechnology Inc. (Japan) )
Kozakai, T. ( SII NanoTechnology Inc. (Japan) )
Matsuda, O. ( SII NanoTechnology Inc. (Japan) )
Suzuki, K. ( SII NanoTechnology Inc. (Japan) )
Okabe, M. ( SII NanoTechnology Inc. (Japan) )
Kikuchi, S. ( SII NanoTechnology Inc. (Japan) )
Uemoto, A. ( SII NanoTechnology Inc. (Japan) )
Yasaka, A. ( SII NanoTechnology Inc. (Japan) )
Adachi, T. ( SII NanoTechnology Inc. (Japan) )
Nishida, N. ( HOYA Corp. (Japan) )
Ozawa, T. ( HOYA Corp. (Japan) )
さらに 12 件
掲載資料名:
24th Annual BACUS Symposium on Photomask Technology
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5567
発行年:
2004
開始ページ:
1132
終了ページ:
1143
総ページ数:
12
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455130 [081945513X]
言語:
英語
請求記号:
P63600/5567-2
資料種別:
国際会議録

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