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Maskless lithography with the solid immersion lens nano probes

著者名:
  • Milster, T. ( Optical Sciences Ctr./Univ. of Arizona (USA) )
  • Chen, T. ( Optical Sciences Ctr./Univ. of Arizona (USA) )
  • Nam, D. ( Samsung Electronics Co., Ltd. (South Korea) )
  • Schlesinger, T. E. ( Carnegie Mellon Univ. (USA) )
掲載資料名:
24th Annual BACUS Symposium on Photomask Technology
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5567
発行年:
2004
開始ページ:
545
終了ページ:
556
総ページ数:
12
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455130 [081945513X]
言語:
英語
請求記号:
P63600/5567-1
資料種別:
国際会議録

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