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Resist model calibration using 2D developed patterns for low-k1 process optimization and wafer printing predictions

著者名:
Chen, T. ( ASML MaskTools, Inc. (USA) )
Van Den Broeke, D. ( ASML MaskTools, Inc. (USA) )
Park, S. ( ASML MaskTools, Inc. (USA) )
Liebchen, A. ( ASML MaskTools, Inc. (USA) )
Chen, J. F. ( ASML MaskTools, Inc. (USA) )
Hsu, S. ( ASML MaskTools, Inc. (USA) )
Park, J. C. ( ASML MaskTools, Inc. (USA) )
Yu, L. ( ASML MaskTools, Inc. (USA) )
Gronlund, K. ( ASML MaskTools, Inc. (USA) )
さらに 4 件
掲載資料名:
24th Annual BACUS Symposium on Photomask Technology
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5567
発行年:
2004
開始ページ:
434
終了ページ:
444
総ページ数:
11
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455130 [081945513X]
言語:
英語
請求記号:
P63600/5567-1
資料種別:
国際会議録

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