Fabrication and testing of Wolter type-I mirrors for soft x-ray microscopes

Fabrication and testing of Wolter type-I mirrors for soft x-ray microscopes

著者名:

Hoshino, M. ( Univ. of Tsukuba (Japan) )
Aoki, S. ( Univ. of Tsukuba (Japan) )
Watanabe, N. ( Univ. of Tsukuba (Japan) )
Hirai, S. ( Univ. of Tsukuba (Japan) )

掲載資料名:

Advances in mirror technology for X-ray, EUV lithography, laser, and other applications II : 5 August 2004, Denver, Colorado, USA

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5533

発行年:

2004

開始ページ:

85

終了ページ:

92

総ページ数:

8

出版情報:

Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819454713 [0819454710]

言語:

英語

請求記号:

P63600/5533

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014734
シリーズID:	PA00000029
会議名:	Optics & Photonics : Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Application
回次:	2004 : 2nd
会議開催地:	Denver, CO, USA
会議開催年:	2004.08.05

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