Proposal for a distributed parallel system for high-throughput maskless e-beam lithography(Invited Paper)
- 著者名:
- Groves, T. R. ( Leica Microsystems GmbH(Germany) )
- Pickard, D. S. ( Stanford Univ. (USA) )
- 掲載資料名:
- 20th European Conference on Mask Technology for Integrated Circuits and Microcomponents
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5504
- 発行年:
- 2004
- 開始ページ:
- 173
- 終了ページ:
- 177
- 総ページ数:
- 5
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819454379 [0819454370]
- 言語:
- 英語
- 請求記号:
- P63600/5504
- 資料種別:
- 国際会議録
類似資料:
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society for Optical Engineering |