Fundamental noise in MEMS force sensors (Invited Paper)

Fundamental noise in MEMS force sensors (Invited Paper)

著者名:

Kenny, T. W. ( Stanford Univ. (USA) )

Liang, Y. ( Stanford Univ. (USA) )

Pruitt, B. L. ( Stanford Univ. (USA) )

Harley, J. A. ( Stanford Univ. (USA) )

Bartsch, M. ( Stanford Univ. (USA) )

Rudnitsky, R. ( Stanford Univ. (USA) )

さらに 1 件

掲載資料名:

Noise and Information in Nanoelectronics, Sensors, and Standards II

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5472

発行年:

2004

開始ページ:

143

終了ページ:

151

総ページ数:

9

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819453945 [0819453943]

言語:

英語

請求記号:

P63600/5472

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014663
シリーズID:	PA00000029
会議名:	International Symposium on Fluctuations and Noise : Noise and Information in Nanoelectronics, Sensors, and Standards
回次:	2004 : 2nd
会議開催地:	Maspalomas, Gran Canaria, Spain
会議開催年:	2004.05.26-2004.05.28

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