Metrology of refractive microlens arrays

Metrology of refractive microlens arrays

著者名:

Weible, K. J. ( SUSS MicroOptics SA (Switzerland) )

Volkel, R. ( SUSS MicroOptics SA (Switzerland) )

Eisner, M. ( SUSS MicroOptics SA (Switzerland) )

Hoffmann, S. ( Univ. de Neuchatel (Switzerland) )

Scharf, T. ( Univ. de Neuchatel (Switzerland) )

Herzig, H. -P. ( Univ. de Neuchatel (Switzerland) )

さらに 1 件

掲載資料名:

Optical Micro- and Nanometrology in Manufacturing Technology

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5458

発行年:

2004

開始ページ:

43

終了ページ:

51

総ページ数:

9

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819453808 [0819453803]

言語:

英語

請求記号:

P63600/5458

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014649
シリーズID:	PA00000029
会議名:	Photonics Europe : Optical micro- and nanometrology in manufacturing technology
回次:	2004
会議開催地:	Strasbourg, France
会議開催年:	2004.04.29-2004.04.30

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