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ICP (inductively coupled plasma) dry etch of DUV MoSi HTPSM

著者名:
Lee, K. Y. ( DuPont Photomasks Korea Ltd. )
Kim, L. J. ( DuPont Photomasks Korea Ltd. )
Nam, K. -H. ( DuPont Photomasks Korea Ltd. )
Park, K. T. ( DuPont Photomasks Korea Ltd. )
Ku, Y. M. ( Hyundai Electronics (Korea) )
Ku, S. S. ( Hyundai Electronics (Korea) )
Hur, I. B. ( Hyundai Electronics (Korea) )
さらに 2 件
掲載資料名:
Photomask and X-Ray Mask Technology VI
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3748
発行年:
1999
開始ページ:
158
終了ページ:
165
総ページ数:
8
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819432308 [081943230X]
言語:
英語
請求記号:
P63600/3748
資料種別:
国際会議録

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