Methacrylate resists and antireflective coatings for 193-nm lithography
- 著者名:
Taylor, G. N. ( Shipley Co. Inc. ) Trefonas, P. ( Shipley Co. Inc. ) Szmanda, C. R. ( Shipley Co. Inc. ) Barclay, G. G. ( Shipley Co. Inc. ) Kavanagh, R. J. ( Shipley Co. Inc. ) Blacksmith, R. F. ( Shipley Co. Inc. ) Joesten, L. A. ( Shipley Co. Inc. ) Monaghan, M. J. ( Shipley Co. Inc. ) Coley, S. ( Shipley Co. Inc. ) Mao, Z. ( Shipley Co. Inc. ) Cameron, J. F. ( Shipley Co. Inc. ) Hardy, R. ( Shipley Co. Inc. ) Gronbeck, D. ( Shipley Co. Inc. ) Connolly, S. ( Shipley Co. Inc. ) - 掲載資料名:
- Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3678
- 発行年:
- 1999
- 開始ページ:
- 174
- 終了ページ:
- 185
- 総ページ数:
- 12
- 出版情報:
- Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819431523 [0819431524]
- 言語:
- 英語
- 請求記号:
- P63600/3678-1
- 資料種別:
- 国際会議録
類似資料:
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |