Development of an incremental structural parameter model for predicting reactive ion etch rates of 193-nm photoresist polymer platforms
- 著者名:
Wallow, T. I. ( IBM Almaden Research Ctr. ) Brock, P. J. ( IBM Almaden Research Ctr. ) DiPietro, R. A. ( IBM Almaden Research Ctr. ) Allen, R. D. ( IBM Almaden Research Ctr. ) Opitz, J. ( IBM Almaden Research Ctr. ) Sooriyakumaran, R. ( IBM Almaden Research Ctr. ) Hofer, D. C. ( IBM Almaden Research Ctr. ) Mewherter, A. M. ( IBM Microelectronics Div. ) Cui, Y. ( IBM Microelectronics Div. ) Yan, W. ( IBM Microelectronics Div. ) Worth, G. ( IBM Microelectronics Div. ) Moreau, W. M. ( IBM Microelectronics Div. ) Meute, J. ( International SEMATECH ) Byers, J. D. ( International SEMATECH ) Rich, G. K. ( International SEMATECH ) McCallum, M. ( International SEMATECH ) Jayaraman, S. ( BFGoodrich ) Vicari, R. ( BFGoodrich ) Cagle, J. ( BFGoodrich ) Sun, S. ( BFGoodrich ) Hullihen, K. A. ( BFGoodrich ) - 掲載資料名:
- Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3678
- 発行年:
- 1999
- 開始ページ:
- 26
- 終了ページ:
- 35
- 総ページ数:
- 10
- 出版情報:
- Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819431523 [0819431524]
- 言語:
- 英語
- 請求記号:
- P63600/3678-1
- 資料種別:
- 国際会議録
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