Dry Etching Techniques of Amorphous Silicon for Suspended Metal Membrane RF MEMS Capacitors
- 著者名:
- 掲載資料名:
- BioMEMS and bionanotechnology : symposium held April 1-3, 2002, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 729
- 発行年:
- 2002
- 開始ページ:
- 69
- 終了ページ:
- 152
- 総ページ数:
- 92
- 出版情報:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558996656 [1558996656]
- 言語:
- 英語
- 請求記号:
- M23500/729
- 資料種別:
- 国際会議録
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SPIE - The International Society of Optical Engineering |
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SPIE-The International Society for Optical Engineering |
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5
国際会議録
Silicon dry etching profile control by RIE at room temperature for MEMS applications [6037-88]
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