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Dry Etching Techniques of Amorphous Silicon for Suspended Metal Membrane RF MEMS Capacitors

著者名:
掲載資料名:
BioMEMS and bionanotechnology : symposium held April 1-3, 2002, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
729
発行年:
2002
開始ページ:
69
終了ページ:
152
総ページ数:
92
出版情報:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558996656 [1558996656]
言語:
英語
請求記号:
M23500/729
資料種別:
国際会議録

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