Optical And Structural Studies Of InGaN Layers And GaN/InGaN MQWs Using TPIS-MOCVD
- 著者名:
Kim, Sunwoon Seo, Junho Lee, Kyuhan Lee, Haeseok Park, Keunseop Kim, Chang-Soo - 掲載資料名:
- Materials and devices for optoelectronics and microphotonics : symposium held April 1-5, 2002, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 722
- 発行年:
- 2002
- 開始ページ:
- 199
- 終了ページ:
- 204
- 総ページ数:
- 6
- 出版情報:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558996588 [1558996583]
- 言語:
- 英語
- 請求記号:
- M23500/722
- 資料種別:
- 国際会議録
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11
国際会議録
Dry Etching of GaN Using Reactive Ion-Beam Etching and Chemically Assisted Reactive Ion-Beam Etching
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