In-situ Studies of Silicide Formation in Ti-Ta Bilayer Thin Films on Poly-Si

In-situ Studies of Silicide Formation in Ti-Ta Bilayer Thin Films on Poly-Si

著者名:

掲載資料名:

Magnetic and electronic films : microstructure, texture and application to data storage : symposium held April 1-4, 2002, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

721

発行年:

2002

開始ページ:

43

終了ページ:

50

総ページ数:

8

出版情報:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558996571 [1558996575]

言語:

英語

請求記号:

M23500/721

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014594
シリーズID:	PA00000011
会議名:	Symposium on magnetic and electronic films
回次:	2002
会議開催地:	San Francisco, CA, USA
会議開催年:	2002.04.01-2002.04.04

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