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Application Of Room-Temperature Photoluminescence For Characterizing As-Grown And Thermally Processed CZ Silicon Wafers

著者名:
Kirscht, F.
Orschel, B.
Kim, S.
Rouvimov, S.
Snegirev, B.
Fletcher, M.
Shabani, M.
Buczkowski, A.
さらに 3 件
掲載資料名:
Defect and impurity engineered semiconductors and devices III : symposium held April 1-5, 2002, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
719
発行年:
2002
開始ページ:
173
終了ページ:
178
総ページ数:
6
出版情報:
Warrendale, Pa: Materials Research Society
ISSN:
02729172
ISBN:
9781558996656 [1558996659]
言語:
英語
請求記号:
M23500/719
資料種別:
国際会議録

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