The Effect of Ge Content in MBE Si_(1-x)Ge_x on the Evolution of 311 Defects
- 著者名:
Crosby, Robert Frazer, Jackie Jones, K.S. Law, M.E. Larsen, A. Nylandsted Hansen, J. Lundsgaard - 掲載資料名:
- Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 717
- 発行年:
- 2002
- 開始ページ:
- 27
- 終了ページ:
- 32
- 総ページ数:
- 6
- 出版情報:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558996533 [1558996532]
- 言語:
- 英語
- 請求記号:
- M23500/717
- 資料種別:
- 国際会議録
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