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A Correlation Study Of Thermal Stability On Porous Low-K

著者名:
Chow, Y.F.
Foo, T.H.
Shen, L.
Pan, J.S.
Du, A. Y.
Xing, Z.X.
Yuan, Y.J.
Li, C.Y.
Kumar, R.
Foo, P.D.
さらに 5 件
掲載資料名:
Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
716
発行年:
2002
開始ページ:
563
終了ページ:
568
総ページ数:
6
出版情報:
Warrendale: Materials Research Society
ISSN:
02729172
ISBN:
9781558996526 [1558996524]
言語:
英語
請求記号:
M23500/716
資料種別:
国際会議録

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