Diffusion Studies Of Cu In Si And Low-K Dielectric Materials
- 著者名:
Prasad, K. Yuan, X.L. Tan, C.M. Zhang, D.H. Li, C. Y. Wang, S.R. Yuan, S.Y.J. Xie, J.L. Gui, D. Foo, P.D. - 掲載資料名:
- Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 716
- 発行年:
- 2002
- 開始ページ:
- 395
- 終了ページ:
- 400
- 総ページ数:
- 6
- 出版情報:
- Warrendale: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558996526 [1558996524]
- 言語:
- 英語
- 請求記号:
- M23500/716
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
SPIE - The International Society for Optical Engineering |
Electrochemical Society |
SPIE - The International Society of Optical Engineering |
Materials Research Society |
SPIE - The International Society of Optical Engineering |
Trans Tech Publications |
Trans Tech Publications |
SPIE - The International Society for Optical Engineering |
Trans Tech Publications |
MRS - Materials Research Society |
SPIE - The International Society of Optical Engineering |