Improvement of Characteristics in Highly Reliable Thin Film Diode With Anodic Tantalum Pentoxide by Low Temperature Annealing Conditions

Improvement of Characteristics in Highly Reliable Thin Film Diode With Anodic Tantalum Pentoxide by Low Temperature Annealing Conditions

著者名:

Lee, Chan-Jae

掲載資料名:

Electrically based microstructural characterization III : symposium held November 26-29, 2001, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

699

発行年:

2002

開始ページ:

191

終了ページ:

196

総ページ数:

6

出版情報:

Warrendale, PA: Materials Research Society

ISSN:

02729172

ISBN:

9781558996359 [1558996354]

言語:

英語

請求記号:

M23500/699

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014574
シリーズID:	PA00000011
会議名:	Symposium on electrically based microstructural characterization
回次:	3rd
会議開催地:	Boston, MA, USA
会議開催年:	2001.11.26-2001.11.29

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