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Spectroscopic Ellipsometry as a Potential In-Line Optical Metrology Tool For Relative Porosity Measurements of Low- K Dielectric Films

著者名:
Edwards, N.V.
Vella, J.
Xie, Q.
Zollner, S.
Werho, D.
Adhihetty, I.
Liu, R.
Tiwald, T.E.
Russell, C.
Vires, J.
Junker, K.H.
さらに 6 件
掲載資料名:
Surface engineering 2001 - fundamentals and applications : symposium held November 26-29, 2001, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
697
発行年:
2002
開始ページ:
101
終了ページ:
106
総ページ数:
6
出版情報:
Warrendale, Penn: Materials Research Society
ISSN:
02729172
ISBN:
9781558996335 [1558996338]
言語:
英語
請求記号:
M23500/697
資料種別:
国際会議録

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