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Iridium Based Electrodes for Ferroelectric Capacitor Fabrication

著者名:
掲載資料名:
Ferroelectric Thin Films X : symposium held November 25-29, 2001, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
688
発行年:
2002
開始ページ:
59
終了ページ:
66
総ページ数:
8
出版情報:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558996243 [1558996249]
言語:
英語
請求記号:
M23500/688
資料種別:
国際会議録

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