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Characteristics of Thick Sol-Gel Lead Zirconate Titanate Films for Angular Rate Sensor Application

著者名:
掲載資料名:
Materials science of microelectromechanical systems (MEMS) devices IV : symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
687
発行年:
2002
開始ページ:
209
終了ページ:
216
総ページ数:
8
出版情報:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558996236 [1558996230]
言語:
英語
請求記号:
M23500/687
資料種別:
国際会議録

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