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A Patterned SOI by Masked Anneal for System-On-Chip Applications

著者名:
掲載資料名:
Materials issues in novel si-based technology : symposium held November 26-28, 2001, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
686
発行年:
2002
開始ページ:
53
終了ページ:
58
総ページ数:
6
出版情報:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558996229 [1558996222]
言語:
英語
請求記号:
M23500/686
資料種別:
国際会議録

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