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Nucleation and Growth During Tungsten Atomic Layer Deposition on Oxide Surfaces

著者名:
掲載資料名:
Mechanisms of surface and microstructure evolution in deposited films and film structures : symposium held April 17-20, 2001, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
672
発行年:
2001
総ページ数:
7
出版情報:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558996083 [1558996087]
言語:
英語
請求記号:
M23500/672
資料種別:
国際会議録

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