Blank Cover Image

A Comprehensive Model for Carbon Suppression of Boron Transient Enhanced Diffusion

著者名:
掲載資料名:
Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
669
発行年:
2001
総ページ数:
6
出版情報:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781558996052 [1558996052]
言語:
英語
請求記号:
M23500/669
資料種別:
国際会議録

類似資料:

1 国際会議録 Implant Enhanced Diffusion of Boron in Silicon Germanium

Fang, Wingra T. C., Griffin, Peter B., Plummer, James D.

MRS - Materials Research Society
7 国際会議録 A Study of the Deactivation of High Concentration, Laser Annealed Dopant Profiles in Silicon

Takamura, Yayoi, Jain, Sameer, Griffin, Peter B., Plummer, James D.

Materials Research Society
2 国際会議録 Physical Modeling of Transient Enhanced Diffusion in Silicon

Griffin, P.B., Plummer, J.D.

Electrochemical Society
8 国際会議録 OXIDATION ENHANCED DOPANT DIFFUSION IN THIN SOI FILMS

Crowder, S.W., Griffin, P.B., Plummer, J.D.

Electrochemical Society
3 国際会議録 Suppression of Boron Transient-Enhanced Diffusion in SiGe HBTs by Carbon Incorporation

Lanzerotti, L. D., Sturm, J. C., Stach, E., Hull, R., Buyuklimanli, T., Magee, C.

MRS - Materials Research Society
9 国際会議録 Atomistic Model of Transient-Enhanced Diffusion and Clustering of Boron in Silicon

Pelaz, L., Gilmer, G. H., Jaraiz, M., Gossmann, H-J., Rafferty, C. S., Eaglesham, D. J., Poate, J. M.

MRS - Materials Research Society
4 国際会議録 The Influence of Amorphizing Implants on Boron Diffusion in Silicon

Chao, H. S., Griffin, P. B., Plummer, J. D.

MRS - Materials Research Society
10 国際会議録 Nitridation Enhanced Diffusion of Antimony in Bulk and Silicon-on-Insulator Material

Crowder, S.W., Griffin, P.B., Plummer, J.D.

Electrochemical Society
5 国際会議録 NVITED: POINT DEFECT BASED MODELING OF DOPANT DIFFUSION AND TRANSIENT ENHANCED DIFFUSION IN SILICON

Plummer, J.D.

Electrochemical Society
11 国際会議録 Experimental Study of Self-Diffusion in Silicon Using Isotopically Enriched Structures

Ural, A., Griffin, P. B., Plummer, J. D.

MRS - Materials Research Society
6 国際会議録 Cross-Sectional TEM Sample Preparation Using E-Beam Lithography and Reactive Ion Etching

Cho, Hyun-Jin, Griffin, Peter B., Plummer, James D.

MRS - Materials Research Society
12 国際会議録 THE INFLUENCE OF POINT DEFECTS ON TWO DIMENSIONAL DIFFUSION KINETICS

Griffin, P.B., Plummer, J.D.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12