Blank Cover Image

Defect Evolution From Low Energy, Amorphizing, Germanium Implants on Silicon

著者名:
掲載資料名:
Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
669
発行年:
2001
総ページ数:
5
出版情報:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781558996052 [1558996052]
言語:
英語
請求記号:
M23500/669
資料種別:
国際会議録

類似資料:

1 国際会議録 Onset of Extended Defect Formation and Enhanced Diffusion for Ultra-Low Energy Boron Implants

Liu, J., Jones, K. S., Downey, D. F., Mehta, S.

MRS - Materials Research Society
7 国際会議録 The Role of Stress on the Shape of the Amorphous-Crystalline Interface and Mask-Edge Defect Formation in Ion-Implanted Silicon

Ross, Carrie E., Jones, Kevin S.

Materials Research Society
2 国際会議録 The Effect of Oxide Trenches on Defect Formation and Evolution in Ion-Implanted Silicon

Burbure, Nina, Jones, Kevin S.

Materials Research Society
8 国際会議録 Effect of Laser Thermal Processing on Defect Evolution in Silicon

Kuryliw, Erik, Jones, Kevin S., Sing, David, Rendon, Michael J., Talwar, Somit

Materials Research Society
3 国際会議録 Effect of Implant Energy on Silicon Defect Evolution

Desroches, J., Krishnamoorthy, V., Jones, K. S., Jasper, C.

MRS - Materials Research Society
9 国際会議録 Regrowth Kinetics Of Self-amorphized Germanium and Evolution Of Implant Damage

S. Koffel, P. Scheiblin, A. Claverie

Electrochemical Society
4 国際会議録 The Effect of a Thin Sample on the Extended Defect Evolution in Si+ Implanted Si

Li, Jing-Hong, Jones, Kevin S.

MRS - Materials Research Society
10 国際会議録 The Effects of Small Concentrations of Oxygen in RTP Annealing of Low Energy Boron, BF2 and Arsenic Ion Implants

Downey, Daniel F., Chow, Judy W., Lerch, Wilfried, Niess, Juergen, Marcus, Steven D.

MRS - Materials Research Society
5 国際会議録 Annealing Studies on Low Energy As+ and As2+ Implants

Srinivasa, Raghu, Agarwal, Vikas, Liu, Jinning, Downey, Daniel F., Banerjee, Sanjay

MRS - Materials Research Society
11 国際会議録 The Effects of Implanted Nitrogen on Diffusion of Boron and Evolution of Extended Defects

Park, Heemyong, Ilderem, Vida, Jasper, Craig, Kaneshiro, Mike, Christiansen, Jim, Jones, Kevin S.

MRS - Materials Research Society
6 国際会議録 Defect Evolution During Laser Annealing

Susan B. Felch, Abhilash Mayur, Vijay Parihar, Faran Nouri, Kevin S. Jones, Daniel E. Zeenberg, Britta E. Jones

Materials Research Society
12 国際会議録 ROLE OF IMPLANT ENERGY ON DEFECT STRUCTURES FOR PHOSPHOROUS IMPLATED SILICON

Prussin, S., Jones, K.S.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12