Blank Cover Image

Characterization of Damage Induced by Cluster Ion Implantation

著者名:
掲載資料名:
Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
669
発行年:
2001
総ページ数:
6
出版情報:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781558996052 [1558996052]
言語:
英語
請求記号:
M23500/669
資料種別:
国際会議録

類似資料:

1 国際会議録 Threshold Energy for Generating Damage With Cluster Ion Irradiation

Seki, Toshio, Aoki, Takaaki, Nakai, Atsuko, Matsuo, Jiro, Takaoka, Gikan H.

Materials Research Society
7 国際会議録 Low Damage Smoothing of Magnetic Materials using Oblique Irradiation of Gas Cluster Ion Beam

Kakuta, Shigeru, Sasaki, Shinji, Furusawa, Kenji, Seki, Toshio, Aoki, Takaaki, Matsuo, Jiro

Materials Research Society
2 国際会議録 Molecular Dynamics Simulations of Cluster Ion Impact on Diamond Surface

Aoki, Takaaki, Matsuo, Jiro, Takaoka, Gikan, Yamada, Isao

Materials Research Society
8 国際会議録 Sputtering yield measurements with size-selected gas cluster ion beams

Jiro Matsuo, Kazuya Ichiki, Satoshi Ninomiya, Toshio Seki, Takaaki Aoki

Materials Research Society
3 国際会議録 Study of Surface Morphological Evolution by Cluster Ion Irradiation on Solid Targets

Aoki, Takaaki, Nakai, Atsuko, Matsuo, Jiro, Takaoka, Gikan

Materials Research Society
9 国際会議録 Molecular Dynamics Study of Surface Morphological Evolution by Cluster Impacts

Aoki, Takaaki, Matsuo, Jiro, Yamada, Isao

Materials Research Society
4 国際会議録 Ar Cluster Ion Bombardment Effects on Semiconductor Surfaces

Seki, Thoshio, Tsumura, Kazumichi, Aoki, Takaaki, Matsuto, Jiro, Takaoka, Gikan H., Yamada, Isao

Materials Research Society
10 国際会議録 Molecular Dynamics Simulation of Fullerene Cluster Ion Impact

Aoki, Takaaki, Seki, Toshio, Tanomura, Masahiro, Matsuo, Jiro, Insepov, Zinetulla, Yamada, Isao

MRS - Materials Research Society
5 国際会議録 Molecular Dynamics Study of Sputtering Process by Reactive Cluster Impacts

Aoki, Takaaki, Matsuo, Jiro

Materials Research Society
11 国際会議録 Secondary Ion Mass Spectrometry With Gas Cluster Ion Beams

Toyoda, Noriaki, Matsuo, Jiro, Aoki, Takaaki, Chiba, Shunichi, Yamada, Isao, Fenner, David B., Torti, Richard

Materials Research Society
6 国際会議録 Ultra Shallow Junction Formation by Cluster Ion Implantation

Matsuo, Jiro, Aoki, Takaaki, Goto, Ken-ichi, Sugii, Toshihiro, Yamada, Isao

MRS - Materials Research Society
12 国際会議録 Photoluminescence Study of Defects Induced by B10H14 Ions

Toyoda, Noriaki, Aoki, Takaaki, Matsuo, Jiro, Yamada, Isao, Wada, Kazumi, Kimerling, Lionel C.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12