Silicon Thin Film Deposition on Nano-Structured ZnO Substrates

Silicon Thin Film Deposition on Nano-Structured ZnO Substrates

著者名:

掲載資料名:

Amorphous and heterogeneous silicon-based films - 2001 : symposium held April 16-20, 2001, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

664

発行年:

2001

総ページ数:

5

出版情報:

Warrendale: Materials Research Society

ISSN:

02729172

ISBN:

9781558996007 [1558996001]

言語:

英語

請求記号:

M23500/664

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014547
シリーズID:	PA00000011
会議名:	Symposium on amorphous and heterogeneous silicon-based films
回次:	2001
会議開催地:	San Francisco, CA, USA
会議開催年:	2001.04.16-2001.04.20

類似資料:

1 国際会議録 Dissipation Mechanisms in Thin-Film Silicon Microresonators on Glass Substrates Gaspar, J., Chu, V., Conde, J. P. Materials Research Society	7 国際会議録 Application of Thin-Film Micromachining for Large-Area Substrates Boucinha, M., Chu, V., Conde, J. P., Soares, V. Materials Research Society
2 国際会議録 Electronic Doping in Porous Nano-Crystalline ZnO Films Konenkamp, R., Wahi, A. MRS - Materials Research Society	8 国際会議録 The Influence of Hydrogen Dilution and Substrate Temperature in Hot-Wire Deposition of Amorphous and Microcrystalline Silicon with Filament Temperatures Between … Conde, J. P., Brogueira, P., Castanha, R., Chu, V. MRS - Materials Research Society
3 国際会議録 Thin Film Amorphous Silicon Bulk-Mode Disk Resonators Fabricated on Glass Substrates A. Gualdino, V. Chu, J.P. Conde Materials Research Society	9 国際会議録 Performance of Thin-Film Silicon MEMS Resonators in Vacuum Gaspar, J., Chu, V., Conde, J. P. Materials Research Society
4 国際会議録 Reliability and Stability of Thin-Film Amorphous Silicon MEMS on Glass Substrates P.M. Sousa, V. Chu, J.P. Conde Materials Research Society	10 国際会議録 Post-Deposition Annealing and Hydrogenation of Hot-Wire Amorphous and Microcrystalline Silicon Films Conde, J. P., Brogueira, P., Chu, V. MRS - Materials Research Society
5 国際会議録 Performance of Thin-Film Silicon MEMS on Flexible Plastic Substrates Samadhan Patil, Virginia Chu, Joao Pedro Conde Materials Research Society	11 国際会議録 Doping Of Amorphous And Microcrystalline Silicon Films By Hot-Wire CVD And RF-PECVD At Low Substrate Temperatures On Plastic Substrates Alpuim, P., Chu, V., Conde, J. P. Materials Research Society
6 国際会議録 Thin-Film Electrostatic Actuators on Flexible Plastic Substrates Gaspar, J., Chu, V., Conde, J. P. Materials Research Society	12 国際会議録 Low Temperature Thin-Film Microelectromechanical Devices On Plastic Substrates Alpuim, P., Boucinha, M., Brogueira, P., Chu, V., Conde, J. P. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12