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MEMS Materials and Fabrication Technology on Large Areas: The Example of an X-ray Imager

著者名:
Daniel, J.H.
Krusor, B.
Lau, R.
Lu, J.P.
Wang, Y.
Mulato, M.
Apte, R.B.
Street, R.A.
Goredema, A.
Boils-Boissier, D.C.
Silver, S.E.
Kazmaier, P.M.
さらに 7 件
掲載資料名:
Materials science of microelectromechanical systems (MEMS) devices III : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
657
発行年:
2001
総ページ数:
6
出版情報:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558995673 [1558995676]
言語:
英語
請求記号:
M23500/657
資料種別:
国際会議録

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