Blank Cover Image

Electrodes and Barriers for DRAM and FERAM: Processing, Integration, and Fundamentals

著者名:
Saenger, K.L.
Andricacos, P.C.
Athavale, S.D.
Baniecki, J.D.
Cabral, C., Jr.
Costrini, G.
Kwietniak, K.T.
Laibowitz, R.B.
Lian, J.J.
Limb, Y.
Neumayer, D.A.
Wise, M.L.
さらに 7 件
掲載資料名:
Ferroelectric thin films IX : symposium held November 26-30, 2000, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
655
発行年:
2001
総ページ数:
11
出版情報:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558995659 [155899565X]
言語:
英語
請求記号:
M23500/655
資料種別:
国際会議録

類似資料:

1 国際会議録 The Effect of Forming Gas Annealing on Pt/(Ba,Sr)Tio3/Pt Thin Film Capacitors for Future DRAM Applications: Electrical Properties and Degradation Mechanisms

Baniecki, J.D., Parks, C., Laibowitz, R.B., Shaw, T.M., Lian, J.

Materials Research Society
7 国際会議録 Bottom electrode effects in controlling orientation of lead zirconate titanate films deposited by chemical solution deposition

Neumayer, Deborah A., Saenger, Katherine L., Laibowitz, Robert B., Shaw, Thomas M., Mih, Rebecca, Grill, Alfred

MRS-Materials Research Society
2 国際会議録 Low-temperature hydrogen induced degradation of (Ba,Sr) TiO3 thin film capacitors

Baniecki, J. D., Parks, C., Laibowitz, R. B., Shaw, T. M., Lian, J., Costrini, G.

MRS-Materials Research Society
8 国際会議録 Model of Superfilling in Damascene Electroplating: Comparison of Experimental Feature Filling with Model Predictions

Deligianni, H., Horkans, J., Kwietniak, K., Dukovic, J.O., Andricacos, P.C., Boettcher, S., Seo, S.-C., Locke, P., …

Electrochemical Society
3 国際会議録 Microstructure Control of (Ba,Sr)TiO3 Films for Gigabit DRAM

Shen, H., Kotecki, D. E., Murphy, R. J., Zaitz, M., Laibowitz, R. B., Shaw, T. M., Saenger, K. L., Baniecki, J., Beitel, …

MRS - Materials Research Society
9 国際会議録 High-Dielectric Constant Insulators and the AMLCD Process: Is Amorphous BST a Candidate?

Dimitrakopoulos, C., Duncombe, P., Grill, A., Laibowitz, R., Libsch, F., Neumayer, D., ry, P., Wisnieff, R.

Materials Research Society
4 国際会議録 Dopants in Electroplated Copper

Andricacos, P.C., Parks, C., Cabral, C., Wachnik, R., Tsai, R., Maihotra, S., Locke, P., Fluegel, J., Horkans, J., …

Electrochemical Society
10 国際会議録 On the Anomalous Codeposition of Ferrous Metal Alloys

Andricacos, P.C.

Electrochemical Society
5 国際会議録 Nonlinear Dielectric Relaxation of Mn Doped Polycrystalline (Ba,Sr)TiO3 Thin Films Over the Temperature Range of 4.2-473 K

Baniecki, J. B., Laibowitz, R. B., Shaw, T. M., Duncombe, P. R., Kotecki, D. E., Shen, H., Lian, J., Ma, Q. Y.

MRS - Materials Research Society
11 国際会議録 Stability and Oxidation Behavior of Ir Thin Film Electrodes on Si and SiO2

Saenger, K. L., Grill, A., Shaw, T. M., Neumayer, D. A., Lin, C., Wang, Y. Y.

MRS - Materials Research Society
6 国際会議録 Electrical and Microwave Properties of Mn-Implanted (Ba,Sr)TiO3 Thin Films

Baniecki, J. D., Laibowitz, R. B., Shaw, T. M., Duncombe, P. R., Neumayer, D. A., Copel, M., Kotecki, D. E., Shen, H., …

MRS - Materials Research Society
12 国際会議録 Barium Strontium Titanate Thin Film Capacitors for Low Inductance Decoupling Applications

Baniecki, J. D., Shioga, T., Kurihara, K.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12