Secondary Ion Mass Spectrometry With Gas Cluster Ion Beams

Secondary Ion Mass Spectrometry With Gas Cluster Ion Beams

著者名:

Toyoda, Noriaki

掲載資料名:

Ion beam synthesis and processing of advanced materials : symposium held November 27-29, 2000, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

647

発行年:

2001

総ページ数:

6

出版情報:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558995574 [1558995579]

言語:

英語

請求記号:

M23500/647

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014532
シリーズID:	PA00000011
会議名:	Symposium on ion beam synthesis and processing of advanced materials
回次:	2000
会議開催地:	Boston, MA, USA
会議開催年:	2000.11.27-2000.11.29

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2 国際会議録 Nano structure formation by gas cluster ion beam irradiations at oblique incidence Toyoda, Noriaki, Yamada, Isao Materials Research Society	8 国際会議録 Molecular Dynamics Study of Surface Morphological Evolution by Cluster Impacts Aoki, Takaaki, Matsuo, Jiro, Yamada, Isao Materials Research Society
3 国際会議録 Cross-sectional TEM Study of Surface Modification of Nanostructure with Gas Cluster Ion Beams Noriaki Toyoda, Isao Yamada Materials Research Society	9 国際会議録 Improvement of Surface Roughness by Ultra-Thin Film Deposition With Oxygen Cluster Ion Beam Assist Deposition Toyoda, Noriaki, Yamada, Isao Materials Research Society
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6 国際会議録 Cluster Ion Beam Process for Nanofabrication Isao Yamada, Noriaki Toyoda Materials Research Society	12 国際会議録 Sputtering yield measurements with size-selected gas cluster ion beams Jiro Matsuo, Kazuya Ichiki, Satoshi Ninomiya, Toshio Seki, Takaaki Aoki Materials Research Society

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