Structural Properties of 3C-SiC Layers Grown on Si Substrates by Electron Cyclotron Resonance CVD Technique
- 著者名:
Giorgis, F. Chiodoni, A. Cicero, G. Ferrero, S. Mandracci, P. Pirri, C.F. Barucca, G. Calcagno, L. Foti, G. Musumeci, P. Reitano, R. - 掲載資料名:
- Silicon carbide--materials, processing and devices : symposium held November 27-29, 2000, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 640
- 発行年:
- 2001
- 総ページ数:
- 6
- 出版情報:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558995505 [1558995501]
- 言語:
- 英語
- 請求記号:
- M23500/640
- 資料種別:
- 国際会議録
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10
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STUDY ON STRUCTURAL, ELECTRICAL AND OPTICAL PROPERTIES OF MICROCRYSTALLINE Si:H AND SiC:H FILMS
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