Growth and Characterization of Epitaxial Al1-xInxN Films Grown on Sapphire (0001) by Plasma Source Molecular Beam Epitaxy
- 著者名:
- 掲載資料名:
- GaN and related alloys - 2000 : symposium held November 27-December 1, 2000, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 639
- 発行年:
- 2001
- 総ページ数:
- 5
- 出版情報:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558995499 [1558995498]
- 言語:
- 英語
- 請求記号:
- M23500/639
- 資料種別:
- 国際会議録
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Characterization of aluminum nitride thin films grown by plasma source molecular-beam epitaxy
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