Precise Characterization of Resists and Thin Gate Dielectrics in the VUV Range for 157nm Lithography
- 著者名:
- 掲載資料名:
- Nonlithographic and lithographic methods of nanofabrication--from ultralarge-scale integration to photonics to molecular electronics : symposium held November 26-December 1, 2000, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 636
- 発行年:
- 2001
- 総ページ数:
- 6
- 出版情報:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558995468 [1558995463]
- 言語:
- 英語
- 請求記号:
- M23500/636
- 資料種別:
- 国際会議録
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